Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4330384 | Process for plasma etching | Sadayuki Okudaira, Keizo Suzuki, Shigeru Nishimatsu | 1982-05-18 |
| 4316090 | Microwave plasma ion source | Noriyuki Sakudo, Katsumi Tokiguchi, Hidemi Koike | 1982-02-16 |