Issued Patents 1982
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4350563 | Dry etching of metal film | Tadakazu Takada, Hitoshi Hoshino | 1982-09-21 |
| 4328262 | Method of manufacturing semiconductor devices having photoresist film as a permanent layer | Toshio Kurahashi, Toshihiko Ono | 1982-05-04 |
| 4328263 | Method of manufacturing semiconductor devices using lift-off technique | Toshio Kurahashi, Tadashi Kiriseko | 1982-05-04 |