Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4325984 | Plasma passivation technique for the prevention of post-etch corrosion of plasma-etched aluminum films | Christopher H. Galfo | 1982-04-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4325984 | Plasma passivation technique for the prevention of post-etch corrosion of plasma-etched aluminum films | Christopher H. Galfo | 1982-04-20 |