Showing 1–15 of 15 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Mitsuo Uchimura | Tokyo Electron Limited | 5 |
| 2 | Masao Oana | Tokyo Electron Limited | 4 |
| 3 | Yoshiharu Yabuki | Fujitsu Limited | 2 |
| 3 | Isao Miki | Glory | 2 |
| #5 | Shinichi Kashiwagi | Toshiba Tec Kabushiki Kaisha | 1 |
| #5 | Ken Masuda | Toshiba Tec Kabushiki Kaisha | 1 |
| #5 | Nobuyuki Sugimura | — | 1 |
| #5 | Eisuke Arai | Dai Nippon Insatsu | 1 |
| #5 | Kimio Banba | — | 1 |
| #5 | Kunitoshi Okayasu | — | 1 |
| #5 | Hideo Ohi | Ihara Chemical Industry Co. | 1 |
| #5 | Tohru Kobayashi | Hitachi | 1 |
| #5 | Wataru Sakurai | Sumitomo Electric Industries | 1 |
| #5 | Masamichi Iwama | Toyota | 1 |
| #5 | Yoshitaka Hashimoto | Canon | 1 |