Issued Patents 1982
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4362385 | Process and arrangement for copying masks on a workpiece with arrangement for correction of alignment errors | — | 1982-12-07 |
| 4357100 | Arrangement for projection copying masks on to a work piece | Herbert E. Mayer | 1982-11-02 |
| 4346164 | Photolithographic method for the manufacture of integrated circuits | Werner Tabarelli | 1982-08-24 |