Issued Patents 1982
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4315201 | Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements | Ryozo Hiraga, Ichiro Kano, Hideki Yoshinari, Masao Totsuka, Yuzo Kato +1 more | 1982-02-09 |