Issued Patents 1982
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4357179 | Method for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD technique | Arthur C. Adams, David E. Aspnes | 1982-11-02 |
| 4332833 | Method for optical monitoring in materials fabrication | David E. Aspnes | 1982-06-01 |